High-Speed Optical Switches
1xN Optical Switches

NxN Optical Switches

High-Speed Optical Switching Systems
Optical Switching Systems

High-Speed VOAs
Fast VOAs

Custom PLZT Photonics
Tunable Filters and Deflectors

Specialty Fiber Arrays
Pigtailed Small Core Fiber Arrays

Fabrication Services
PZT/PLZT Deposition and Patterning

Dicing and Polishing



EpiPhotonics conducts full range of processes starting from device design, PZT and PLZT thin film wafer fabrication in its own clean room, packaging, and testing.
  • Design: Simulators, CAD.
  • Thin film deposition: RTA, Sputtering, E-beam deposition, etc.
  • Microfabrication: Spinner, Aligner, Baking truck, Asher, Dry etcher, etc.
  • Post wafer: Dicer, Polisher, Wire bonder, Fiber aligner, etc.
  • Testing: Switching curve, IL, PDL, RL, WDL, etc..

PZT/PLZT Deposition and Microfabrication

EpiPhotonics is the expert of oxide thin-film technology including PZT/PLZT devices. EpiPhotonics provides high quality PZT and PLZT thin films based on its unique chemical solution deposition technology for photonics and piezoelectrics/MEMS, and microfbrication of PZT/PLZT thin films.

  • PZT thin film deposition (1 um-3 um) on Pt/Ti/SiO2/Si wafers for piezoelectrics/MEMS
  • PLZT waveguide deposition (3 um-8 um) on single crystal oxide wafers
  • Micro-patterning of PZT/PLZT
  • Metal layer deposition (Pt, Au, Ti, Cr, ITO) and patterning

Example of epitaxial PZT thin film: cross section and etched pattern (SEM)

Dicing and Polishing
EpiPhotonics dices waveguide wafers and polishes waveguide end faces.

EpiPhotonics aligns and connects optical fibers to polished waveguides.

Please contact us at for more details.