FABRICATION ServiceS

EpiPhotonics conducts full range of processes starting from device design, PZT and PLZT thin film wafer fabrication in its own clean room, packaging, and testing.

• Design: Simulators, CAD.
• Thin film deposition: RTA, Sputtering, E-beam deposition, etc.
• Microfabrication: Spinner, Aligner, Baking truck, Asher, Dry etcher, etc.
• Post wafer: Dicer, Polisher, Wire bonder, Fiber aligner, etc.
• Testing: Switching curve, IL, PDL, RL, WDL, etc..

PZT/PLZT Deposition and Microfabrication
EpiPhotonics is the expert of oxide thin-film technology including PZT/PLZT devices. EpiPhotonics provides high quality PZT and PLZT thin films based on its unique chemical solution deposition technology for photonics and piezoelectrics/MEMS, and microfbrication of PZT/PLZT thin films.

• PZT thin film deposition (1 um-3 um) on Pt/Ti/SiO2/Si wafers for piezoelectrics/MEMS
• PLZT waveguide deposition (3 um-8 um) on single crystal oxide wafers
• Micro-patterning of PZT/PLZT
• Metal layer deposition (Pt, Au, Ti, Cr, ITO) and patterning

Dicing and Polishing
EpiPhotonics dices waveguide wafers and polishes waveguide end faces.


Pigtailing
EpiPhotonics aligns and connects optical fibers to polished waveguides.

Please contact us at sales@epiphotonics.com for more details.